发明授权
- 专利标题: System with sealed polishing pad
- 专利标题(中): 系统带密封抛光垫
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申请号: US11400079申请日: 2006-04-05
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公开(公告)号: US07163437B1公开(公告)日: 2007-01-16
- 发明人: Bogdan Swedek , David J. Lischka , Jeffrey Drue David , Dominic J. Benvegnu
- 申请人: Bogdan Swedek , David J. Lischka , Jeffrey Drue David , Dominic J. Benvegnu
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Fish & Richardson
- 主分类号: B24B7/22
- IPC分类号: B24B7/22
摘要:
A polishing pad, polishing system, method of making a polishing pad and method of using a polishing pad. The polishing pad includes a polishing layer having a polishing surface, a backing layer with an aperture and a first portion that is permeable to liquid, and a sealant that penetrates a second portion of the backing layer adjacent to and surrounding the aperture such that the second portion is substantially impermeable to liquid. The aperture is positioned below a substantially fluid-impermeable element.
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