发明授权
US07163885B2 Method of migrating and fixing particles in a solution to bumps on a chip
有权
将溶液中的颗粒迁移并固定在芯片上的凸块上的方法
- 专利标题: Method of migrating and fixing particles in a solution to bumps on a chip
- 专利标题(中): 将溶液中的颗粒迁移并固定在芯片上的凸块上的方法
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申请号: US10862515申请日: 2004-06-05
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公开(公告)号: US07163885B2公开(公告)日: 2007-01-16
- 发明人: Yu-Chih Chen , Ruoh-Huey Uang , Yu-Hua Chen
- 申请人: Yu-Chih Chen , Ruoh-Huey Uang , Yu-Hua Chen
- 申请人地址: TW Hsinchu
- 专利权人: Industrial Technology Research Institute
- 当前专利权人: Industrial Technology Research Institute
- 当前专利权人地址: TW Hsinchu
- 优先权: TW93107259A 20040318
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A method for dispersing and fixing particles on the bumps of a chip using an electrophoresis technology is provided. The particles and chip bumps are processed to carry charges by applying chemical bonding between metal and thiol with electric charges. The chip is placed in a reactor with a solution along with the conductive particles. The conductive particles are then migrated and fixed to the bonding locations on the bumps of a chip through an electrophoresis procedure. For conductive particles not carrying charges, they can sink naturally to the surface of chip bumps due to their higher density than water in the solution. An electroplating procedure is then applied to fix the conductive particles onto the bump.
公开/授权文献
- US20050227475A1 Method of conductive particles dispersing 公开/授权日:2005-10-13
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