发明授权
US07164826B2 Method for fabricating optical devices by assembling multiple wafers containing planar optical waveguides
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通过组装包含平面光波导的多个晶片来制造光学器件的方法
- 专利标题: Method for fabricating optical devices by assembling multiple wafers containing planar optical waveguides
- 专利标题(中): 通过组装包含平面光波导的多个晶片来制造光学器件的方法
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申请号: US11328529申请日: 2006-01-10
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公开(公告)号: US07164826B2公开(公告)日: 2007-01-16
- 发明人: Mark D. Feuer , Nicholas J. Frigo
- 申请人: Mark D. Feuer , Nicholas J. Frigo
- 申请人地址: US NY New York
- 专利权人: AT&T Corp.
- 当前专利权人: AT&T Corp.
- 当前专利权人地址: US NY New York
- 主分类号: G02B6/26
- IPC分类号: G02B6/26
摘要:
A method for fabricating optical devices comprises the steps of preparing a first substrate wafer with at least one buried optical waveguide on an approximately flat planar surface of the substrate and a second substrate wafer with at least a second buried optical waveguide. The waveguides so formed may be straight or be curved along the surface of the wafer or curved by burying the waveguide at varying depth along its length. The second wafer is turned (flipped) and bonded to the first wafer in such a manner that the waveguides, for example, may form an optical coupler or may crossover one another and be in proximate relationship along a region of each. As a result, three dimensional optical devices are formed avoiding conventional techniques of layering on a single substrate wafer. Optical crossover angles may be reduced, for example, to thirty degrees from ninety degrees saving substrate real estate. Recessed areas may be provided in one or the other substrate surface reducing crosstalk in a completed three dimensional crossover device. Three dimensional optical couplers may comprise waveguides of identical or dissimilar characteristics. Moreover, three dimensional optical switches may be formed using the proposed flip and bond assembly process.
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