Invention Grant
US07168249B2 Microelectrical mechanical structure (MEMS) optical modulator and optical display system 有权
微电机械结构(MEMS)光调制器和光学显示系统

Microelectrical mechanical structure (MEMS) optical modulator and optical display system
Abstract:
A microelectrical mechanical out-of-plane thermal buckle-beam actuator is capable of providing transverse-plane movement of shutters. The actuator includes a pair of structural anchors secured to a substrate and one or more thermal buckle-beams secured at respective base ends to the anchors. Each buckle-beam extends substantially parallel to and spaced-apart from the substrate and is releasable from the substrate at points other than at the anchors. The thermal buckle-beam actuators are suitable for use in a microelectrical mechanical optical display system.
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