Invention Grant
US07168249B2 Microelectrical mechanical structure (MEMS) optical modulator and optical display system
有权
微电机械结构(MEMS)光调制器和光学显示系统
- Patent Title: Microelectrical mechanical structure (MEMS) optical modulator and optical display system
- Patent Title (中): 微电机械结构(MEMS)光调制器和光学显示系统
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Application No.: US11285401Application Date: 2005-11-22
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Publication No.: US07168249B2Publication Date: 2007-01-30
- Inventor: Gary K. Starkweather , Michael J. Sinclair
- Applicant: Gary K. Starkweather , Michael J. Sinclair
- Applicant Address: US WA Redmond
- Assignee: Microsoft Corporation
- Current Assignee: Microsoft Corporation
- Current Assignee Address: US WA Redmond
- Agency: Woodcock Washburn LLP
- Main IPC: F01B29/10
- IPC: F01B29/10

Abstract:
A microelectrical mechanical out-of-plane thermal buckle-beam actuator is capable of providing transverse-plane movement of shutters. The actuator includes a pair of structural anchors secured to a substrate and one or more thermal buckle-beams secured at respective base ends to the anchors. Each buckle-beam extends substantially parallel to and spaced-apart from the substrate and is releasable from the substrate at points other than at the anchors. The thermal buckle-beam actuators are suitable for use in a microelectrical mechanical optical display system.
Public/Granted literature
- US20060070379A1 Microelectrical mechanical structure (MEMS) optical modulator and optical display system Public/Granted day:2006-04-06
Information query
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