发明授权
US07168787B2 Monolithic bubble-ink jet print head having anti-curing-deformation part and fabrication method thereof 有权
具有抗固化变形部分的单片气泡喷墨打印头及其制造方法

Monolithic bubble-ink jet print head having anti-curing-deformation part and fabrication method thereof
摘要:
A monolithic bubble ink jet print head includes an anti-curing-deformation part formed at at least one of an inner surface of a nozzle plate or a chamber/nozzle plate forming ink chambers and an outer surface of the nozzle plate or the chamber/nozzle plate forming a front or outer surface of the printer head to prevent an abnormal deformation from being generated in the nozzle plate or the chamber/nozzle plate during a curing process. A fabrication method of a monolithic bubble-ink jet print head includes forming a sacrificial photo resist mold having a flow channel structure including ink chambers and restrictors on the substrate, forming a chamber/nozzle plate having an anti-curing-deformation part and nozzles on the sacrificial photo resist mold, removing the sacrificial photo resist mold from the substrate over which chamber/nozzle plate is formed, and curing the substrate from which the sacrificial photo resist mold is removed.
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