发明授权
US07169684B2 Device having inductors and capacitors and a fabrication method thereof
失效
具有电感器和电容器的装置及其制造方法
- 专利标题: Device having inductors and capacitors and a fabrication method thereof
- 专利标题(中): 具有电感器和电容器的装置及其制造方法
-
申请号: US10373735申请日: 2003-02-27
-
公开(公告)号: US07169684B2公开(公告)日: 2007-01-30
- 发明人: Moon-chul Lee , In-sang Song , Young-tack Hong , Sung-hye Jeong , Jeong-yoo Hong
- 申请人: Moon-chul Lee , In-sang Song , Young-tack Hong , Sung-hye Jeong , Jeong-yoo Hong
- 申请人地址: KR Suwon
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon
- 代理机构: Lee & Morse, P.C.
- 优先权: KR10-2002-0011721 20020305
- 主分类号: H01L21/30
- IPC分类号: H01L21/30
摘要:
An LC device having a substrate, a support layer having upper and lower sides formed on the substrate, inductors formed on either the upper or lower side of the support layer, and capacitors formed in the opposite side of the support layer. The support layer may be formed of a low-k dielectric material, and a connection portion may be provided to connect the inductors and capacitors in the support layer. The inductors and capacitors are disposed in a stacked structure on the upper and lower sides of the low-k dielectric support layer on the substrate, so that space efficiency may be maximized on the substrate. The low-k dielectric support layer provides support between the inductors and capacitors so that substrate loss is minimized and a Q factor of the inductors is enhanced.
公开/授权文献
信息查询
IPC分类: