发明授权
US07170054B2 Scanning probe microscopy cantilever holder and scanning probe microscope using the cantilever holder
有权
使用悬臂支架扫描探针显微镜悬臂支架和扫描探针显微镜
- 专利标题: Scanning probe microscopy cantilever holder and scanning probe microscope using the cantilever holder
- 专利标题(中): 使用悬臂支架扫描探针显微镜悬臂支架和扫描探针显微镜
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申请号: US11199290申请日: 2005-08-08
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公开(公告)号: US07170054B2公开(公告)日: 2007-01-30
- 发明人: Masato Iyoki , Masatsugu Shigeno
- 申请人: Masato Iyoki , Masatsugu Shigeno
- 申请人地址: JP
- 专利权人: SII Nanotechnology Inc.
- 当前专利权人: SII Nanotechnology Inc.
- 当前专利权人地址: JP
- 代理机构: Adams & Wilks
- 优先权: JP2004-243124 20040824; JP2005-148929 20050523
- 主分类号: G01N13/16
- IPC分类号: G01N13/16 ; G01B5/28
摘要:
A scanning probe microscope having a cantilever holder is provided which gives a cantilever great amplitude by a small-sized vibrator configurable in a limited space and is stably operated even in environments of high viscous drag such as a liquid. A cantilever base part of a cantilever is fixed to a fixing part of a scanning probe microscopy cantilever holder. A vibrator is mounted on the fixing part. When it is defined that the front side is the side close to a probe and the rear side is the side close to a supporting part of the fixing part along in the longitudinal direction of the cantilever, the vibrator displaces the front and rear sides of the fixing part of the cantilever holder to each other in the opposite directions within the plane orthogonal to the sample surface to vibrate the cantilever in a liquid.
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