发明授权
US07170305B2 Apparatus and method for terminating probe apparatus of semiconductor wafer
有权
用于终止半导体晶片的探针装置的装置和方法
- 专利标题: Apparatus and method for terminating probe apparatus of semiconductor wafer
- 专利标题(中): 用于终止半导体晶片的探针装置的装置和方法
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申请号: US11266144申请日: 2005-11-03
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公开(公告)号: US07170305B2公开(公告)日: 2007-01-30
- 发明人: Bryan J. Root , William A. Funk
- 申请人: Bryan J. Root , William A. Funk
- 申请人地址: US MN Burnsville
- 专利权人: Celadon Systems, Inc.
- 当前专利权人: Celadon Systems, Inc.
- 当前专利权人地址: US MN Burnsville
- 代理机构: Dorsey & Whitney LLP
- 主分类号: G01R31/02
- IPC分类号: G01R31/02
摘要:
A probe apparatus and method of terminating a probe that probes a semiconductor device with a signal cable from a tester side by side at a proximal end of the probe and a distal end of the signal cable. In one embodiment, the probe apparatus includes: a chassis; a dielectric block mounted in the chassis for retaining the probe, the probe extending on the chassis from a proximal end of the probe to the dielectric block, extending through the dielectric block, and projecting from the dielectric block towards the semiconductor device at a distal end of the probe; and a terminating apparatus, mounted in the chassis, for terminating the proximal end of the probe with a distal end of the signal cable side by side.
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