发明授权
US07173180B2 Silane composition, silicon film forming method and solar cell production method 失效
硅烷组成,硅膜形成方法和太阳能电池的制备方法

Silane composition, silicon film forming method and solar cell production method
摘要:
A silane composition for preparing a semiconductor thin films of a solar cell is disclosed. The silane composition contains a polysilane compound represented by the formula SinRm (n is an integer of 3 or more, m is an integer of n to (2n+2) and an m number of R's are each independently a hydrogen atom, alkyl group, phenyl group or halogen atom, with the proviso that when all the m number of R's are hydrogen atoms and m=2n, n is an integer of 7 or more), and at least one silane compound selected from cyclopentasilane, cyclohexasilane and silylcyclopentasilane.
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