发明授权
- 专利标题: System and method for moving an object employing piezo actuators
- 专利标题(中): 使用压电致动器移动物体的系统和方法
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申请号: US11012060申请日: 2004-12-15
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公开(公告)号: US07173363B2公开(公告)日: 2007-02-06
- 发明人: Stefan Gertud Marie Hendriks , Thomas Augustus Mattaar , Gerardus Jacobus Cornelis Catharina Maria Leenheers
- 申请人: Stefan Gertud Marie Hendriks , Thomas Augustus Mattaar , Gerardus Jacobus Cornelis Catharina Maria Leenheers
- 申请人地址: NL Veldhoven
- 专利权人: ASML Netherlands B.V.
- 当前专利权人: ASML Netherlands B.V.
- 当前专利权人地址: NL Veldhoven
- 代理机构: Pillsbury Winthrop Shaw Pittman, LLP
- 主分类号: H01L41/08
- IPC分类号: H01L41/08
摘要:
A piezo actuator system, is presented herein. A piezo actuator system comprises a number of piezo actuators which may lengthen and shear. Using the lengthening and shearing, the piezo actuator system grips and moves an object in response to a first and a second control signal, respectively. The possible displacement of the object is limited by the maximum shear of the piezo actuators. To increase the possible displacement, the piezo actuators may be controlled to perform a linear shear sequence or a shuffle sequence. During the linear shear sequence, the object is moved; during the shuffle sequence the object is substantially stationary, while the piezo actuators are repositioned with respect to the object, after which the object may be moved further using the linear shear sequence.