发明授权
- 专利标题: Method of fabricating electrical connection terminal of embedded chip
- 专利标题(中): 嵌入式芯片电气连接端子的制造方法
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申请号: US10923711申请日: 2004-08-24
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公开(公告)号: US07174631B2公开(公告)日: 2007-02-13
- 发明人: Shih-Ping Hsu , Kun-Chen Tsai
- 申请人: Shih-Ping Hsu , Kun-Chen Tsai
- 申请人地址: TW
- 专利权人: Phoenix Precision Technology Corporation
- 当前专利权人: Phoenix Precision Technology Corporation
- 当前专利权人地址: TW
- 代理机构: Clark & Brody
- 代理商 William F. Nixon
- 优先权: TW93110073A 20040412
- 主分类号: H01K3/22
- IPC分类号: H01K3/22
摘要:
An electrical connection terminal of an embedded chip and a method for fabricating the same are disclosed. An insulating layer is provided on a circuit board integrated with a chip and has a plurality of first openings for exposing a conductive pad of the chip. A first metal layer is formed on the conductive pad, and a conductive layer if formed on surfaces of the first metal layer, the insulating layer and the first openings. A patterned resist layer is formed on the conductive layer and has a plurality of second openings for exposing a part of the conductive layer corresponding to the condictive pad of the chip. A second metal layer is formed on the exposed part of the conductive layer by an electroplating process. Thus, the fabrication of conductive structure of the conductive pad of the ship and build-up of conductive circuits on the circuit board are integrated simultaneously.
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