发明授权
- 专利标题: Technique for high-efficiency ion implantation
- 专利标题(中): 高效离子注入技术
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申请号: US11313714申请日: 2005-12-22
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公开(公告)号: US07176470B1公开(公告)日: 2007-02-13
- 发明人: Morgan D. Evans , Douglas Thomas Fielder , Gregg Alexander Norris
- 申请人: Morgan D. Evans , Douglas Thomas Fielder , Gregg Alexander Norris
- 申请人地址: US MA Gloucester
- 专利权人: Varian Semiconductor Equipment Associates, Inc.
- 当前专利权人: Varian Semiconductor Equipment Associates, Inc.
- 当前专利权人地址: US MA Gloucester
- 代理机构: Hunton & Williams LLP
- 主分类号: H01J21/265
- IPC分类号: H01J21/265
摘要:
A technique for high-efficiency ion implantation is disclosed. In one particular exemplary embodiment, the technique may be realized as an apparatus for high-efficiency ion implantation. The apparatus may comprise one or more measurement devices to determine a shape of an ion beam spot in a first dimension and a second dimension. The apparatus may also comprise a control module to control movement of the ion beam across a substrate according to a two-dimensional velocity profile, wherein the two-dimensional velocity profile is determined based at least in part on the shape of the ion beam spot, and wherein the two-dimensional velocity profile is tunable to maintain a uniform ion dose and to keep the ion beam spot from going fully off the substrate surface.
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