发明授权
- 专利标题: Actuator coil cooling system
- 专利标题(中): 执行器线圈冷却系统
-
申请号: US11154669申请日: 2005-06-17
-
公开(公告)号: US07176593B2公开(公告)日: 2007-02-13
- 发明人: Daniel N. Galburt
- 申请人: Daniel N. Galburt
- 申请人地址: NL Veldhoven
- 专利权人: ASML Holding N.V.
- 当前专利权人: ASML Holding N.V.
- 当前专利权人地址: NL Veldhoven
- 代理机构: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- 主分类号: H02K9/00
- IPC分类号: H02K9/00
摘要:
An actuator coil with a race track winding that generates a magnetic field. A cooling tube has cooling liquid flowing therethrough and is wrapped around a periphery of the race track winding. A plurality of thermal conductive strips are arranged generally transverse to at least portions of the race track winding so as to conduct heat from the racetrack winding to the cooling tube.
公开/授权文献
- US20050231048A1 Actuator coil cooling system 公开/授权日:2005-10-20
信息查询