Invention Grant
- Patent Title: Measuring specular reflectance of a sample
- Patent Title (中): 测量样品的镜面反射率
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Application No.: US10472296Application Date: 2002-03-28
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Publication No.: US07177025B2Publication Date: 2007-02-13
- Inventor: Michael R. Hammer , Robert J. Francis
- Applicant: Michael R. Hammer , Robert J. Francis
- Applicant Address: AU Mulgrave
- Assignee: Varian Australia Pty Ltd
- Current Assignee: Varian Australia Pty Ltd
- Current Assignee Address: AU Mulgrave
- Agent Bella Fishman; Edward B. Berkowitz
- Priority: AUPR4202 20010404
- International Application: PCT/AU02/00385 WO 20020328
- International Announcement: WO02/082062 WO 20021017
- Main IPC: G01N21/55
- IPC: G01N21/55

Abstract:
Apparatus (10) for measuring absolute specular reflectance of a surface of a sample (22) includes a sample holder (12), a light source (18) for transmitting an incident light beam (16) onto a surface of the sample (22) and a detector (26 ) for detecting a specularly reflected component of the incident light. The light source (18), sample holder (12) and detector (26) are mounted and operatively associate (14, 24, 28) to be relatively moveable to vary the angle of incidence of light (16) onto sample (22) and to correspondingly automatically vary the relative position of the detector (26) such that the angle of reflection equals the angle of incidence. In the absence of the sample (22) or upon removal of the sample holder (12), light (16) impinges directly onto detector (26) to directly allow measurement of the absolute intensity of the light beam (16) as a reference measurement. This avoids the need to use intervening optical components such as mirrors which may degrade over time. It also allows provision of a relatively simplified apparatus.
Public/Granted literature
- US20040136005A1 Measuring specular reflectance of a sample Public/Granted day:2004-07-15
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