发明授权
- 专利标题: Static and dynamic pressure sensor
- 专利标题(中): 静态和动态压力传感器
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申请号: US11023202申请日: 2004-12-27
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公开(公告)号: US07181972B2公开(公告)日: 2007-02-27
- 发明人: Samhita Dasgupta , Jeffrey Bernard Fortin , Steven Francis LeBoeuf , Vinayak Tilak , Chayan Mitra , Kanakasabapathi Subramanian , Steven Alfred Tysoe
- 申请人: Samhita Dasgupta , Jeffrey Bernard Fortin , Steven Francis LeBoeuf , Vinayak Tilak , Chayan Mitra , Kanakasabapathi Subramanian , Steven Alfred Tysoe
- 申请人地址: US NY Schenectady
- 专利权人: General Electric Company
- 当前专利权人: General Electric Company
- 当前专利权人地址: US NY Schenectady
- 代理机构: Fletcher Yoder
- 主分类号: G01L9/00
- IPC分类号: G01L9/00
摘要:
A sensor, in accordance with aspects of the present technique, is provided. The sensor comprises a membrane formed of gallium nitride. The membrane is disposed on a substrate, which is wet-etched to form a closed cavity. The membrane exhibits both a capacitive response and a piezo-response to an external stimulus. The sensor further includes a circuit for measuring at least one of the capacitive response or the piezo-response. In certain aspects, the sensor may be operable to measure external stimuli, such as, pressure, force and mechanical vibration.
公开/授权文献
- US20060137456A1 Static and dynamic pressure sensor 公开/授权日:2006-06-29