- 专利标题: Wafer container and door with vibration dampening latching mechanism
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申请号: US10982402申请日: 2004-11-05
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公开(公告)号: US07182203B2公开(公告)日: 2007-02-27
- 发明人: John Burns , Matthew A. Fuller , Jeffery J. King , Martin L. Forbes , Mark V. Smith
- 申请人: John Burns , Matthew A. Fuller , Jeffery J. King , Martin L. Forbes , Mark V. Smith
- 申请人地址: US MN Chaska
- 专利权人: Entegris, Inc.
- 当前专利权人: Entegris, Inc.
- 当前专利权人地址: US MN Chaska
- 代理机构: Patterson, Thuente, Skaar & Christensen, P.A.
- 主分类号: B65D85/30
- IPC分类号: B65D85/30
摘要:
A container for holding a plurality of wafers in an axially aligned, generally parallel spaced apart arrangement includes an enclosure portion having a top, a bottom, a pair of opposing sides, a back and an open front. At least one wafer support is provided in the enclosure along with a kinematic coupling on the bottom of the enclosure. The container has a door for sealingly closing the open front which includes a chassis and an operable latching mechanism on the chassis. The latching mechanism includes a cam selectively rotatable to shift the latching mechanism between a first favored position and a second favored position and at least one vibration dampener for dampening vibrations generated when the latching mechanism is shifted between the first and second favored positions.
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