发明授权
- 专利标题: Beam direction module and optical switch using the same
- 专利标题(中): 光束方向模块和光开关使用相同
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申请号: US10890131申请日: 2004-07-14
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公开(公告)号: US07184619B2公开(公告)日: 2007-02-27
- 发明人: Atsushi Kazama , Kazuyuki Fukuda , Toshiya Shiramatsu , Masaya Horino , Yasuhiro Itou
- 申请人: Atsushi Kazama , Kazuyuki Fukuda , Toshiya Shiramatsu , Masaya Horino , Yasuhiro Itou
- 申请人地址: JP Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Antonelli, Terry, Stout and Kraus, LLP.
- 优先权: JP2003-196183 20030714
- 主分类号: G02B6/26
- IPC分类号: G02B6/26
摘要:
A beam direction module which can be applied to an optical switch, comprising: a collimator support member; a first mirror substrate including first micro-mirrors, and first windows through which beams can pass; a first electrode substrate including first mirror driving electrodes, and second windows through which beams can pass; a first spacer; a second mirror substrate including second micro-mirrors, and third windows through which beams can pass; a second electrode substrate including second mirror driving electrodes, and fourth windows through which beams can pass; a second spacer; and an inter-mirror spacer, wherein the first electrode substrate, the first spacer, the first mirror substrate, the inter-mirror spacer, the second mirror substrate, the second spacer and the second electrode substrate are stacked successively on the collimator support member and fixed between caps and the collimator support member while pins protruding from the collimator support member are inserted into alignment through-holes formed.
公开/授权文献
- US20050013534A1 Beam direction module and optical switch using the same 公开/授权日:2005-01-20
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