发明授权
- 专利标题： Method of determining alignment of a template and a substrate having a liquid disposed therebetween
- 专利标题（中）： 确定模板与其间具有液体的衬底的对准的方法
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申请号： US10805916申请日： 2004-03-22
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公开(公告)号： US07186483B2公开(公告)日： 2007-03-06
- 发明人: Sidlgata V. Sreenivasan , Byung-Jin Choi , Matthew E. Colburn , Todd C. Bailey
- 申请人： Sidlgata V. Sreenivasan , Byung-Jin Choi , Matthew E. Colburn , Todd C. Bailey
- 申请人地址： US TX Austin
- 专利权人： Board of Regents, The University of Texas System
- 当前专利权人： Board of Regents, The University of Texas System
- 当前专利权人地址： US TX Austin
- 代理机构： Fish & Richardson P.C.
- 主分类号： G03C5/00
- IPC分类号： G03C5/00 ; G03F9/00
摘要：
The present invention includes a method of aligning a substrate and a template spaced-apart from the substrate with an activating light curable liquid disposed therebetween, the substrate having substrate alignment marks and the template having template alignment marks, the method including, reducing a distance between the substrate and the template to cause a spreading of the activating light curable liquid; and varying an overlay placement of the template with respect to the substrate such that the template alignment marks are substantially aligned with the substrate alignment marks before the spreading causes the activating light curable liquid to cover an area between the substrate alignment marks and the template alignment marks.
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