Invention Grant
- Patent Title: Bump structure
- Patent Title (中): 凹凸结构
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Application No.: US10938594Application Date: 2004-09-13
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Publication No.: US07187078B2Publication Date: 2007-03-06
- Inventor: Tzu-Han Lin , Huei-Mei Yu , Chia-Jen Cheng , Chun-Yen Lo , Li-Hsin Tseng , Boe Su , Simon Lu
- Applicant: Tzu-Han Lin , Huei-Mei Yu , Chia-Jen Cheng , Chun-Yen Lo , Li-Hsin Tseng , Boe Su , Simon Lu
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co. Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co. Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Main IPC: H01L29/40
- IPC: H01L29/40

Abstract:
Solder bump structures for semiconductor device packaging is provided. In one embodiment, a solder bump structure comprises a semiconductor substrate, the substrate has at least one contact pad and an upper passivation layer having at least one opening formed therein exposing a portion of the contact pad. At least one patterned and etched polymer layer is formed on a portion of the contact pad. At least one patterned and etched conductive metal layer is formed above the polymer layer and is aligned therewith. And at least one layer of solder material having a solder height is provided above the conductive metal layer, the layer of solder is aligned with the conductive metal layer, the layer of solder is thereafter reflown thereby creating a solder ball.
Public/Granted literature
- US20060055035A1 Bump structure Public/Granted day:2006-03-16
Information query
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