发明授权
- 专利标题： Image forming method and charged particle beam apparatus
- 专利标题（中）： 成像方法和带电粒子束装置
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申请号： US11298590申请日： 2005-12-12
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公开(公告)号： US07187345B2公开(公告)日： 2007-03-06
- 发明人: Atsushi Kobaru , Hidetoshi Morokuma , Hiroki Kawada , Sho Takami , Katsuhiro Sasada , Kouichi Yamamoto , Norio Satou , Kunio Nakanishi
- 申请人： Atsushi Kobaru , Hidetoshi Morokuma , Hiroki Kawada , Sho Takami , Katsuhiro Sasada , Kouichi Yamamoto , Norio Satou , Kunio Nakanishi
- 申请人地址： JP Tokyo
- 专利权人： Hitachi High-Technologies Corporation
- 当前专利权人： Hitachi High-Technologies Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Antonelli, Terry, Stout and Kraus, LLP.
- 优先权： JP2005-221185 20050729; JP2005-338009 20051124
- 主分类号： G09G1/08
- IPC分类号： G09G1/08 ; G21K1/08 ; H04N3/16
摘要：
An image forming method and a charged particle beam apparatus suitable for suppressing the inclination of charging when scanning a two-dimensional area with a charged particle beam. A third scanning line located between a first scanning line and a second scanning line is scanned. After the first, second and third scanning lines have been scanned, a plurality of scanning lines are scanned between the first and third scanning lines and between the second and third scanning lines.
公开/授权文献
- US20070024528A1 IMAGE FORMING METHOD AND CHARGED PARTICLE BEAM APPARATUS 公开/授权日：2007-02-01
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