Invention Grant
- Patent Title: Capacitive pressure sensor
- Patent Title (中): 电容式压力传感器
-
Application No.: US11107510Application Date: 2005-04-15
-
Publication No.: US07191661B2Publication Date: 2007-03-20
- Inventor: Torsten Ohms , Oliver Stoll
- Applicant: Torsten Ohms , Oliver Stoll
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102004018408 20040416
- Main IPC: G01L9/12
- IPC: G01L9/12

Abstract:
A capacitive pressure sensor made up of two silicon on insulator (SOI) wafers lying opposite of each other and joined to each other in a vacuum-tight manner, a recess being formed between the two wafers. The first wafer exclusively supports the evaluation circuits required for measuring the applied pressure and a capacitive electrode, and the second wafer has a recess formed by surface micromechanics processes, in which the counter electrode to the capacitive electrode of the first wafer is situated. The second wafer at the same time forms a cover for the first wafer.
Public/Granted literature
- US20050229711A1 Capacitive pressure sensor and method of manufacture Public/Granted day:2005-10-20
Information query