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US07192145B2 Integrated actuator meniscus mirror without reaction mass 有权
集成执行器弯月镜无反应质量

Integrated actuator meniscus mirror without reaction mass
摘要:
An integrated actuator meniscus mirror includes an optical substrate having a mirror surface on one side and a support structure on the other for controllably altering the shape of the mirror surface without a reaction mass.
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