发明授权
- 专利标题: Integrated actuator meniscus mirror without reaction mass
- 专利标题(中): 集成执行器弯月镜无反应质量
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申请号: US10946799申请日: 2004-09-22
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公开(公告)号: US07192145B2公开(公告)日: 2007-03-20
- 发明人: Mark A. Ealey
- 申请人: Mark A. Ealey
- 申请人地址: US MA Devens
- 专利权人: Xinetics, Inc.
- 当前专利权人: Xinetics, Inc.
- 当前专利权人地址: US MA Devens
- 代理机构: Iandiorio & Teska
- 主分类号: G02B5/08
- IPC分类号: G02B5/08 ; G02B7/183 ; G02B7/185
摘要:
An integrated actuator meniscus mirror includes an optical substrate having a mirror surface on one side and a support structure on the other for controllably altering the shape of the mirror surface without a reaction mass.
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