发明授权
- 专利标题: Polishing pad, method of producing the same, and cushion layer for polishing pad
- 专利标题(中): 抛光垫,其制造方法和抛光垫用缓冲层
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申请号: US10432410申请日: 2001-11-28
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公开(公告)号: US07192340B2公开(公告)日: 2007-03-20
- 发明人: Koichi Ono , Tetsuo Shimomura , Masahiko Nakamori , Takatoshi Yamada , Shigeru Komai , Masayuki Tsutsumi
- 申请人: Koichi Ono , Tetsuo Shimomura , Masahiko Nakamori , Takatoshi Yamada , Shigeru Komai , Masayuki Tsutsumi
- 申请人地址: JP Osaka
- 专利权人: Toyo Tire & Rubber Co., Ltd.
- 当前专利权人: Toyo Tire & Rubber Co., Ltd.
- 当前专利权人地址: JP Osaka
- 代理机构: Knobbe Martens Olson & Bear, LLP
- 优先权: JP2000-367468 20001201; JP2000-367469 20001201; JP2001-013405 20010122; JP2001-061221 20010306; JP2001-103699 20010402; JP2001-225568 20010726; JP2001-234577 20010802; JP2001-269928 20010906; JP2001-274011 20010910; JP2001-302939 20010928; JP2001-302940 20010928; JP2001-302941 20010928
- 国际申请: PCT/JP01/10363 WO 20011128
- 国际公布: WO02/43921 WO 20020606
- 主分类号: B24D11/00
- IPC分类号: B24D11/00
摘要:
The polishing pad of this invention is a polishing pad effecting stable planarizing processing, at high polishing rate, materials requiring surface flatness at high level, such as a silicon wafer for semiconductor devices, a magnetic disk, an optical lens etc. This invention provides a polishing pad which can be subjected to surface processing to form a sheet or grooves, is excellent in thickness accuracy, attains a high polishing rate, achieves a uniform polishing rate, and also provides a polishing pad which is free of quality variations resulting from an individual variation, easily enables a change the surface patterns, enables fine surface pattern, is compatible with various materials to be polished, is free of burrs upon forming the pattern. This invention provides a polishing pad which can have abrasive grains mixed at very high density without using slurry, and generates few scratches by preventing aggregation of abrasive grains dispersed therein. The polishing pad of this invention has a polishing layer formed from a curing composition to be cured with energy rays, the polishing layer being formed surface pattern thereon by photolithography. The polishing pad of this invention comprises a polishing layer resin having abrasive grains dispersed therein, the resin containing ionic groups in the range of 20 to 1500 eq/ton.
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