发明授权
- 专利标题： Rotating or rotatable compensator spectroscopic ellipsometer system including multiple element lenses
- 专利标题（中）： 旋转或可旋转补偿器光谱椭偏仪系统包括多个元件透镜
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申请号： US10829620申请日： 2004-04-22
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公开(公告)号： US07193710B1公开(公告)日： 2007-03-20
- 发明人: Blaine D. Johs , Martin M. Liphardt , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , John A. Woollam
- 申请人： Blaine D. Johs , Martin M. Liphardt , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , John A. Woollam
- 申请人地址： US NE Lincoln
- 专利权人： J.A. Woollam Co., Inc.
- 当前专利权人： J.A. Woollam Co., Inc.
- 当前专利权人地址： US NE Lincoln
- 代理商 James D. Welch
- 主分类号： G01J4/00
- IPC分类号： G01J4/00
摘要：
Disclosed are spectroscopic ellipsometer systems which include polarizer and analyzer elements which remain fixed in position during data acquisition, and at least one continuously rotating or step-wise rotatable compensator which transmits an electromagnetic beam therethrough and imposes a continuously variable or plurality of sequentially discrete polarization states on a beam of electromagnetic radiation; and at least one multiple element lens which also transmits the electromagnetic beam therethrough.