发明授权
- 专利标题： Micro mirror and method of manufacturing the same
- 专利标题（中）： 微镜及其制造方法
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申请号： US11203375申请日： 2005-08-15
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公开(公告)号： US07194152B2公开(公告)日： 2007-03-20
- 发明人: Myung-bok Lee , Jin-seung Sohn , Eun-hyoung Cho , Hae-sung Kim
- 申请人： Myung-bok Lee , Jin-seung Sohn , Eun-hyoung Cho , Hae-sung Kim
- 申请人地址： KR Gyeonggi-do
- 专利权人： Samsung Electro-Mechanics Co., Ltd.
- 当前专利权人： Samsung Electro-Mechanics Co., Ltd.
- 当前专利权人地址： KR Gyeonggi-do
- 代理机构： Sughrue Mion, PLLC
- 优先权： KR10-2004-0079201 20041005
- 主分类号： G02B6/12
- IPC分类号： G02B6/12
摘要：
A micro mirror and a method of manufacturing the same are provided. The micro mirror includes a silicon substrate having a first slant plane and a second slant plane that face each other, and a clad layer including a first mirror surface and a second mirror surface respectively formed on the first slant plane and the second slant plane, wherein the clad layer reflects light.
公开/授权文献
- US20060072870A1 Micro mirror and method of manufacturing the same 公开/授权日：2006-04-06
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