发明授权
US07194725B1 System and method for design rule creation and selection 失效
设计规则创建和选择的系统和方法

System and method for design rule creation and selection
摘要:
A method of producing design rules including generating a plurality of parametrically varying geometric layouts and simulating how each geometric layout will pattern on a wafer. Edges of structures within the simulated geometric layouts can be classified based on manufacturability and design rules can be created to disallow layouts demonstrating poor manufacturability.
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