发明授权
- 专利标题: Polishing apparatus and method of polishing work piece
- 专利标题(中): 抛光设备和抛光工件的方法
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申请号: US11443390申请日: 2006-05-30
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公开(公告)号: US07195546B2公开(公告)日: 2007-03-27
- 发明人: Toshiro Doi , Ara Philipossian , Darren DeNardis
- 申请人: Toshiro Doi , Ara Philipossian , Darren DeNardis
- 申请人地址: JP Tokorozawa JP Nagano
- 专利权人: Toshiro Doi,Fujikoshi Machinery Corp.
- 当前专利权人: Toshiro Doi,Fujikoshi Machinery Corp.
- 当前专利权人地址: JP Tokorozawa JP Nagano
- 代理机构: Jordan and Hamburg LLP
- 优先权: JP2003-390677 20031120; JP2003-390692 20031120
- 主分类号: B24B1/00
- IPC分类号: B24B1/00
摘要:
The polishing apparatus is capable of changing a pH value of slurry to adjust polishing rate and polishing a work piece with high flatness. The polishing apparatus comprises: a pressure vessel; a polishing plate provided in the pressure vessel; a pressing plate pressing a work piece onto the polishing plate; a driving unit relatively moving the polishing plate with respect to the pressing plate so as to polish the work piece; a gas supplying source supplying an alkaline gas or an acid gas into the pressure vessel; a gas discharging section discharging the supplied gas from the pressure vessel; and a slurry supplying unit supplying slurry onto the polishing plate. A pH value of the slurry is adjusted by dissolving the alkaline gas or the acid gas in the slurry.
公开/授权文献
- US20060217039A1 Polishing apparatus and method of polishing work piece 公开/授权日:2006-09-28
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