Invention Grant
- Patent Title: Electromechanical resonator and method for fabricating such a resonator
- Patent Title (中): 机电谐振器及其制造方法
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Application No.: US10895616Application Date: 2004-07-21
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Publication No.: US07196451B2Publication Date: 2007-03-27
- Inventor: Stephane Monfray , Pascal Ancey , Thomas Skotnicki , Karim Segueni
- Applicant: Stephane Monfray , Pascal Ancey , Thomas Skotnicki , Karim Segueni
- Applicant Address: FR Montrouge
- Assignee: STMicroelectronics SA
- Current Assignee: STMicroelectronics SA
- Current Assignee Address: FR Montrouge
- Agency: Fleit, Kain, Gibbon, Gutman, Bongini & Bianco P.L.
- Agent Lisa K. Jorgenson; Jose Gutman
- Priority: FR0309106 20030725
- Main IPC: H02N1/00
- IPC: H02N1/00
Abstract:
An electromechanical resonator includes a monocrystalline-silicon substrate (S) provided with an active zone (ZA) delimited by an insulating region, a vibrating beam (10) anchored by at least one of its free ends on the insulating region and including a monocrystalline-silicon vibrating central part (12), and a control electrode (E) arranged above the beam and bearing on the active zone. The central part (12) of the beam is separated from the active zone (ZA) and from the control electrode (E).
Public/Granted literature
- US20050199970A1 Electromechanical resonator and method for fabricating such a resonator Public/Granted day:2005-09-15
Information query
