发明授权
- 专利标题: Refrigerant supply apparatus
- 专利标题(中): 制冷剂供应装置
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申请号: US10776168申请日: 2004-02-12
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公开(公告)号: US07201016B2公开(公告)日: 2007-04-10
- 发明人: Hiroyuki Maruyama
- 申请人: Hiroyuki Maruyama
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Fitzpatrick, Cella, Harper & Scinto
- 优先权: JP2003-038610 20030217
- 主分类号: F25B43/04
- IPC分类号: F25B43/04
摘要:
A refrigerant supply apparatus for supplying a refrigerant to a cooling target. The apparatus includes a refrigerant supply channel through which pure water as the refrigerant is supplied to the cooling target, an impurity removing unit disposed in an impurity removing channel which is a channel different from the refrigerant supply channel, a sensor which measures a purity of the pure water, and a valve which stops supply of the pure water to the cooling target when the purity of the pure water does not satisfy a predetermined standard.
公开/授权文献
- US20040162008A1 Refrigerant supply apparatus 公开/授权日:2004-08-19
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