发明授权
- 专利标题： Method of manufacturing a cloverleaf microgyroscope and cloverleaf microgyroscope
- 专利标题（中）： 三叶草微镜和三叶草微陀螺的制作方法
-
申请号： US10933853申请日： 2004-09-03
-
公开(公告)号： US07202100B1公开(公告)日： 2007-04-10
- 发明人: Randall L. Kubena , Frederic P. Stratton , David T. Chang
- 申请人： Randall L. Kubena , Frederic P. Stratton , David T. Chang
- 申请人地址： US CA Malibu
- 专利权人： HRL Laboratories, LLC
- 当前专利权人： HRL Laboratories, LLC
- 当前专利权人地址： US CA Malibu
- 代理机构： Ladas & Parry LLP
- 主分类号： H01L21/00
- IPC分类号： H01L21/00
摘要：
The present invention relates to a method of manufacturing a cloverleaf microgyroscope containing an integrated post comprising: attaching a post wafer to a resonator wafer, forming a bottom post from the post wafer being attached to the resonator wafer, attaching the resonator wafer to a base wafer, wherein the bottom post fits into a post hole in the base wafer, forming a top post from the resonator wafer, wherein the bottom and top post are formed symmetrically around the same axis, and attaching a cap wafer on top of the base wafer. The present invention relates further to a gyroscope containing an integrated post with on or off-chip electronics.