Disclosed is a fluorine compound having perfluorostyrene introduced at a terminal thereof, as represented in the following Formula 1, and a coating solution and an optical waveguide device using the same, characterized in that the introduction of perfluorostyrene results in a facile fabrication of thin films by a UV curing or a thermal curing, high thermal stability and chemical resistance, and low optical propagation loss and birefringence: Wherein Z is O or S; RF is an aliphatic or aromatic group; y is a natural number of 1–10; y′ is an integer of 0–1; x is an integer of 0–200; and Wherein B is a single bond or selected from the group consisting of —CO—, —SO2—, —S— and —O—, and Hal is selected from the group consisting of F, Cl, Br and I.