发明授权
- 专利标题: Timing control for two-chamber gas discharge laser system
- 专利标题(中): 双室气体放电激光系统的时序控制
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申请号: US10922692申请日: 2004-08-20
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公开(公告)号: US07203216B2公开(公告)日: 2007-04-10
- 发明人: Alexander I. Ershov , Richard M. Ness
- 申请人: Alexander I. Ershov , Richard M. Ness
- 申请人地址: US CA San Diego
- 专利权人: Cymer Inc.
- 当前专利权人: Cymer Inc.
- 当前专利权人地址: US CA San Diego
- 代理商 William C. Cray
- 主分类号: H01S3/22
- IPC分类号: H01S3/22
摘要:
Feedback timing control equipment and process for an injection seeded modular gas discharge laser. A preferred embodiment is a system capable of producing high quality pulsed laser beams at pulse rates of about 4,000 Hz or greater and at pulse energies of about 5 to 10 mJ or greater for integrated outputs of about 20 to 40 Watts or greater. The feedback timing control is programmed to permit in some circumstances discharges timed so that no significant laser energy is output from the system. Use of this technique permits burst mode operation in which the first discharge of a burst is a no-output discharge so that timing parameters for each of the two chambers can be monitored before the first laser output pulse of the burst. Two separate discharge chambers are provided, one of which is a part of a master oscillator producing a very narrow band seed beam which is amplified in the second discharge chamber. The chambers can be controlled separately permitting optimization of wavelength parameters in the master oscillator and optimization of pulse energy parameters in the amplifying chamber.
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