发明授权
US07208966B2 Contact probe, measuring pad used for the contact probe, and method of manufacturing the contact probe
有权
接触式探针，用于接触式探针的测量垫以及接触式探头的制造方法
- 专利标题： Contact probe, measuring pad used for the contact probe, and method of manufacturing the contact probe
- 专利标题（中）： 接触式探针，用于接触式探针的测量垫以及接触式探头的制造方法
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申请号： US11136572申请日： 2005-05-25
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公开(公告)号： US07208966B2公开(公告)日： 2007-04-24
- 发明人: Masahiro Aoyagi , Hiroshi Nakagawa , Kazuhiko Tokoro , Katsuya Kikuchi , Yoshikuni Okada , Shigeo Kiyota
- 申请人： Masahiro Aoyagi , Hiroshi Nakagawa , Kazuhiko Tokoro , Katsuya Kikuchi , Yoshikuni Okada , Shigeo Kiyota
- 申请人地址： JP Tokyo JP Tokyo
- 专利权人： National Institute of Advanced Industrial Science and Technology,Kiyota Manufacturing Co.
- 当前专利权人： National Institute of Advanced Industrial Science and Technology,Kiyota Manufacturing Co.
- 当前专利权人地址： JP Tokyo JP Tokyo
- 代理机构： Westerman, Hattori, Daniels & Adrian, LLP.
- 优先权： JP2004-156983 20040527; JP2005-115988 20050413
- 主分类号： G01R31/02
- IPC分类号： G01R31/02
摘要：
There is provided a contact probe that is smaller than 50 μm in a pitch between a signal electrode and a ground electrode and can correctly conduct a high-speed high-frequency measurement, a measuring pad used for the contact probe, and a method of manufacturing the contact probe. The contact probe includes: a tip member having a signal electrode 10a and a ground electrode 11a that are put into contact with an object to be measured; and a coaxial cable 1 having a core 1b electrically connected to the signal electrode 10a and an outer covering conductor 1a electrically connected to the ground electrode 1a, wherein the tip member is formed on a printed wiring board 2, and wherein the signal electrode 10a and the ground electrode 11a are constructed of fine coplanar strip lines formed on an insulating board 2a.