Invention Grant
- Patent Title: Piezoelectric actuator and micro-electromechanical device
- Patent Title (中): 压电致动器和微机电装置
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Application No.: US11196596Application Date: 2005-08-04
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Publication No.: US07215066B2Publication Date: 2007-05-08
- Inventor: Takashi Kawakubo , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki
- Applicant: Takashi Kawakubo , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
- Priority: JP2004-269911 20040916
- Main IPC: H01L41/053
- IPC: H01L41/053

Abstract:
A piezoelectric actuator includes a first beam including a first bottom electrode, a first piezoelectric film on the first bottom electrode, and a first top electrode on the first piezoelectric film, a fixed end assigned at an end of the first beam and fixed on a substrate, a connecting end assigned at another end of the first beam and suspended over a free space; and a second beam including a second piezoelectric film connected to the first piezoelectric film at the connecting end, a second bottom electrode under the second piezoelectric film, and a second top electrode on the second piezoelectric film, a working end assigned at an end of the second beam opposite to another end to which the connecting end is assigned and suspended over the free space; wherein a distance between centers of the fixed end and the working end is shorter than a distance from the working end to the connecting end.
Public/Granted literature
- US20060055287A1 Piezoelectric actuator and micro-electromechanical device Public/Granted day:2006-03-16
Information query
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