发明授权
- 专利标题: Fin FET and method of fabricating same
- 专利标题(中): 翅片FET及其制造方法
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申请号: US11050915申请日: 2005-02-04
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公开(公告)号: US07217623B2公开(公告)日: 2007-05-15
- 发明人: Keun-Nam Kim , Hung-Mo Yang , Choong-Ho Lee
- 申请人: Keun-Nam Kim , Hung-Mo Yang , Choong-Ho Lee
- 申请人地址: KR Suwon-Si, Gyeonggi-do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-Si, Gyeonggi-do
- 代理机构: Marger Johnson & McCollom, P.C.
- 优先权: KR10-2004-0007426 20040205
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
A fin field effect transistor (fin FET) is formed using a bulk silicon substrate and sufficiently guarantees a top channel length formed under a gate, by forming a recess having a predetermined depth in a fin active region and then by forming the gate in an upper part of the recess. A device isolation film is formed to define a non-active region and a fin active region in a predetermined region of the substrate. In a portion of the device isolation film a first recess is formed, and in a portion of the fin active region a second recess having a depth shallower than the first recess is formed. A gate insulation layer is formed within the second recess, and a gate is formed in an upper part of the second recess. A source/drain region is formed in the fin active region of both sides of a gate electrode.
公开/授权文献
- US20050173759A1 Fin FET and method of fabricating same 公开/授权日:2005-08-11
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