发明授权
- 专利标题: Positioning apparatus, exposure apparatus, and method for producing device
- 专利标题(中): 定位装置,曝光装置及其制造方法
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申请号: US10798812申请日: 2004-03-10
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公开(公告)号: US07221463B2公开(公告)日: 2007-05-22
- 发明人: Makoto Mizuno , Ryo Nawata , Mitsuru Inoue
- 申请人: Makoto Mizuno , Ryo Nawata , Mitsuru Inoue
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Morgan & Finnegan, LLP
- 优先权: JP2003-070037 20030314; JP2003-121915 20030425
- 主分类号: G01B11/14
- IPC分类号: G01B11/14 ; G03B27/42
摘要:
The present invention provides a positioning apparatus capable of performing six-axis micro adjustment of an optical element in an exposure apparatus with high accuracy, and the exposure apparatus. The positioning apparatus of the present invention includes a first measurement unit for measuring a position/inclination of a moving part having an optical element while being kept from contact with the moving part, and a driving unit capable of driving the moving part in directions of six axes with respect to a fixed part while being kept from contact with the moving part, based on the result of measurement by the first measurement unit.
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