发明授权
US07226528B2 Methods of making coated articles by sputtering silver in oxygen inclusive atmosphere
有权
通过在包含氧气的气氛中溅射银制造涂层制品的方法
- 专利标题： Methods of making coated articles by sputtering silver in oxygen inclusive atmosphere
- 专利标题（中）： 通过在包含氧气的气氛中溅射银制造涂层制品的方法
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申请号： US10802918申请日： 2004-03-18
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公开(公告)号： US07226528B2公开(公告)日： 2007-06-05
- 发明人: Ronald E. Laird , George Neuman , Philip J. Lingle , Jean-Marc Lemmer , Keith H. Schillinger
- 申请人： Ronald E. Laird , George Neuman , Philip J. Lingle , Jean-Marc Lemmer , Keith H. Schillinger
- 申请人地址： US MI Auburn Hills unknown Grand Duche de Luxembourg
- 专利权人： Guardian Industries Corp.,Centre Luxembourgeois de Recherches pour le Verre et la Ceramique S.A. (C.R.V.C.)
- 当前专利权人： Guardian Industries Corp.,Centre Luxembourgeois de Recherches pour le Verre et la Ceramique S.A. (C.R.V.C.)
- 当前专利权人地址： US MI Auburn Hills unknown Grand Duche de Luxembourg
- 代理机构： Nixon & Vanderhye P.C.
- 主分类号： C23C14/34
- IPC分类号： C23C14/34
摘要：
A sputter coated article is provided with improved mechanical durability (e.g., pre-HT scratch resistance) and/or thermal stability by sputtering at least one Ag inclusive layer in an atmosphere including at least O2 gas. For instance, in certain example embodiments an Ag inclusive target may be sputtered in an atmosphere including a combination of Ar and O2 gas. In certain embodiments, this enables the resulting AgOx infrared (IR) reflecting layer to better adhere to adjacent contact layer(s).
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