Invention Grant
US07227140B2 Method, system and device for microscopic examination employing fib-prepared sample grasping element 有权
使用纤维制备的样品把持元件进行显微镜检查的方法,系统和装置

Method, system and device for microscopic examination employing fib-prepared sample grasping element
Abstract:
A method including, in one embodiment, severing a sample at least partially from a substrate by cutting the substrate with a focused ion beam (FIB), capturing the substrate sample by activating a grasping element, and separating the captured sample from the substrate. The captured sample may be separated from the substrate and transported to an electron microscope for examination.
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