Invention Grant
US07227140B2 Method, system and device for microscopic examination employing fib-prepared sample grasping element
有权
使用纤维制备的样品把持元件进行显微镜检查的方法,系统和装置
- Patent Title: Method, system and device for microscopic examination employing fib-prepared sample grasping element
- Patent Title (中): 使用纤维制备的样品把持元件进行显微镜检查的方法,系统和装置
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Application No.: US10948385Application Date: 2004-09-23
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Publication No.: US07227140B2Publication Date: 2007-06-05
- Inventor: George Skidmore , Matthew D. Ellis , Aaron Geisberger , Kenneth Bray , Kimberly Tuck , Robert Folaron
- Applicant: George Skidmore , Matthew D. Ellis , Aaron Geisberger , Kenneth Bray , Kimberly Tuck , Robert Folaron
- Applicant Address: US TX Richardson
- Assignee: Zyvex Instruments, LLC
- Current Assignee: Zyvex Instruments, LLC
- Current Assignee Address: US TX Richardson
- Agency: Haynes and Boone, LLP
- Main IPC: G21G5/00
- IPC: G21G5/00

Abstract:
A method including, in one embodiment, severing a sample at least partially from a substrate by cutting the substrate with a focused ion beam (FIB), capturing the substrate sample by activating a grasping element, and separating the captured sample from the substrate. The captured sample may be separated from the substrate and transported to an electron microscope for examination.
Public/Granted literature
- US20050178980A1 Method, system and device for microscopic examination employing fib-prepared sample grasping element Public/Granted day:2005-08-18
Information query
IPC分类:
G | 物理 |
G21 | 核物理;核工程 |
G21G | 化学元素的转变;放射源 |
G21G5/00 | 通过化学反应进行化学元素的推断转变 |