发明授权
- 专利标题: High performance probe system
- 专利标题(中): 高性能探头系统
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申请号: US11273889申请日: 2005-11-14
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公开(公告)号: US07227371B2公开(公告)日: 2007-06-05
- 发明人: Charles A. Miller
- 申请人: Charles A. Miller
- 申请人地址: US CA Livermore
- 专利权人: FormFactor, Inc.
- 当前专利权人: FormFactor, Inc.
- 当前专利权人地址: US CA Livermore
- 代理商 N. Kenneth Burraston
- 主分类号: G01R31/02
- IPC分类号: G01R31/02
摘要:
A probe system for providing signal paths between an integrated circuit (IC) tester and input/output, power and ground pads on the surfaces of ICs to be tested includes a probe board assembly, a flex cable and a set of probes arranged to contact the IC's I/O pads. The probe board assembly includes one or more rigid substrate layers with traces and vias formed on or within the substrate layers providing relatively low bandwidth signal paths linking the tester to probes accessing some of the IC's pads. The flex cable provides relatively high bandwidth signal paths linking the tester to probes accessing others of the IC's pads.
公开/授权文献
- US20060066332A1 High performance probe system 公开/授权日:2006-03-30
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