Invention Grant
US07229694B2 Micromechanical component and method for producing an anti-adhesive layer on a micromechanical component 有权
微机械部件和在微机械部件上制造防粘层的方法

Micromechanical component and method for producing an anti-adhesive layer on a micromechanical component
Abstract:
A micromechanical component includes an anti-adhesive layer, formed from at least one fluorine-containing silane, applied to at least parts of its surface for reducing surface forces. To increase mechanical and thermal load capacity, the anti-adhesive layer is provided as a multilayer coating which is formed from at least one metal oxide layer and at least one layer composed of at least one fluorine-containing silane.
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