Invention Grant
- Patent Title: Micromechanical component and method for producing an anti-adhesive layer on a micromechanical component
- Patent Title (中): 微机械部件和在微机械部件上制造防粘层的方法
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Application No.: US10446583Application Date: 2003-05-27
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Publication No.: US07229694B2Publication Date: 2007-06-12
- Inventor: Lutz Mueller , Kersten Kehr , Markus Ulm
- Applicant: Lutz Mueller , Kersten Kehr , Markus Ulm
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE10223359 20020525
- Main IPC: B32B9/04
- IPC: B32B9/04
Abstract:
A micromechanical component includes an anti-adhesive layer, formed from at least one fluorine-containing silane, applied to at least parts of its surface for reducing surface forces. To increase mechanical and thermal load capacity, the anti-adhesive layer is provided as a multilayer coating which is formed from at least one metal oxide layer and at least one layer composed of at least one fluorine-containing silane.
Public/Granted literature
- US20040033372A1 Micromechanical component and method for producing an anti-adhesive layer on a micromechanical component Public/Granted day:2004-02-19
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