Invention Grant
- Patent Title: Anodes for fluorine gas discharge lasers
- Patent Title (中): 氟气放电激光器阳极
-
Application No.: US10672722Application Date: 2003-09-26
-
Publication No.: US07230965B2Publication Date: 2007-06-12
- Inventor: Timothy S. Dyer , Richard G. Morton , Walter D. Gillespie , Thomas D. Steiger
- Applicant: Timothy S. Dyer , Richard G. Morton , Walter D. Gillespie , Thomas D. Steiger
- Applicant Address: US CA San Diego
- Assignee: Cymer, Inc.
- Current Assignee: Cymer, Inc.
- Current Assignee Address: US CA San Diego
- Agent William Cray
- Main IPC: H01S3/22
- IPC: H01S3/22 ; H01S3/03 ; H01S3/097

Abstract:
Electrodes for a fluorine gas discharge laser are disclosed which may comprise a crown straddling the centerline axis between the pair of side walls and the pair of end walls, comprising a first material, forming at least a portion of the discharge region of the electrode; the crown in traverse cross section having the shape of the upper half of a canted ellipse rotated in the preionizer direction, such that a tangent to the short centerline axis of the ellipse forms an angle with the horizontal. Another embodiment may comprise an anode blade having a top portion and a first and second sidewall portion each intersecting the top portion; the anode blade being formed with the shape in cross section of the top portion being curvilinear and intersecting the generally straight potions of each of first and second sidewall portions along a radius of curvature and with the top portion beveled away from an asymmetric discharge side of the anode.
Public/Granted literature
- US20040071178A1 Anodes for fluorine gas discharge lasers Public/Granted day:2004-04-15
Information query