发明授权
- 专利标题: Anodes for fluorine gas discharge lasers
- 专利标题(中): 氟气放电激光器阳极
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申请号: US10672722申请日: 2003-09-26
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公开(公告)号: US07230965B2公开(公告)日: 2007-06-12
- 发明人: Timothy S. Dyer , Richard G. Morton , Walter D. Gillespie , Thomas D. Steiger
- 申请人: Timothy S. Dyer , Richard G. Morton , Walter D. Gillespie , Thomas D. Steiger
- 申请人地址: US CA San Diego
- 专利权人: Cymer, Inc.
- 当前专利权人: Cymer, Inc.
- 当前专利权人地址: US CA San Diego
- 代理商 William Cray
- 主分类号: H01S3/22
- IPC分类号: H01S3/22 ; H01S3/03 ; H01S3/097
摘要:
Electrodes for a fluorine gas discharge laser are disclosed which may comprise a crown straddling the centerline axis between the pair of side walls and the pair of end walls, comprising a first material, forming at least a portion of the discharge region of the electrode; the crown in traverse cross section having the shape of the upper half of a canted ellipse rotated in the preionizer direction, such that a tangent to the short centerline axis of the ellipse forms an angle with the horizontal. Another embodiment may comprise an anode blade having a top portion and a first and second sidewall portion each intersecting the top portion; the anode blade being formed with the shape in cross section of the top portion being curvilinear and intersecting the generally straight potions of each of first and second sidewall portions along a radius of curvature and with the top portion beveled away from an asymmetric discharge side of the anode.
公开/授权文献
- US20040071178A1 Anodes for fluorine gas discharge lasers 公开/授权日:2004-04-15