- 专利标题: High temperature pressure sensing system
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申请号: US11234724申请日: 2005-09-23
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公开(公告)号: US07231828B2公开(公告)日: 2007-06-19
- 发明人: Anthony D. Kurtz , Wolf S. Landmann , Alexander A. Ned
- 申请人: Anthony D. Kurtz , Wolf S. Landmann , Alexander A. Ned
- 申请人地址: US NJ Leonia
- 专利权人: Kulite Semiconductor Products, Inc.
- 当前专利权人: Kulite Semiconductor Products, Inc.
- 当前专利权人地址: US NJ Leonia
- 代理机构: Plevy, Howard & Darcy, PC
- 主分类号: G01L9/06
- IPC分类号: G01L9/06
摘要:
A high temperature pressure sensing system (transducer) including: a pressure sensing piezoresistive sensor formed by a silicon-on-insulator (SOI) process; a SOI amplifier circuit operatively coupled to the piezoresistive sensor; a SOI gain controller circuit including a plurality of resistances that when selectively coupled to the amplifier adjust a gain of the amplifier; a plurality of off-chip contacts corresponding to the resistances, respectively, for electrically activating the corresponding resistances and using a metallization layer for the SOI sensor and SOI ASIC suitable for high temperature interconnections (bonding); wherein the piezoresistive sensor, amplifier circuit and gain control circuit are suitable for use in environments having a temperature greater than 175 degrees C. and reaching between 250° C. and 300° C., and wherein the entire transducer has a high immunity to nuclear radiation.
公开/授权文献
- US20070068267A1 High temperature pressure sensing system 公开/授权日:2007-03-29
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