发明授权
US07239738B2 Image defect inspecting apparatus and image defect inspecting method 失效
图像缺陷检查装置和图像缺陷检查方法

Image defect inspecting apparatus and image defect inspecting method
摘要:
An image defect inspecting apparatus of the present invention includes a template image producing section for producing a template image from reference image data, a corresponding image extracting section for extracting a predetermined image located at a position corresponding to a template image from digital data of a scanned image for inspection, data embedding sections for embedding desired same pattern data into the template image and the image extracted by the corresponding image extracting section, a normalized correlation value calculation processing unit for acquiring a normalized correlation coefficient from the template image and the extracted image, into which the pattern data is embedded, and a defect judging section for judging as to whether a defect is present by comparing the normalized correlation coefficient acquired by the normalized correlation value calculation processing unit with a predetermined threshold value so as to acquire a large/small relationship thereof.
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