- 专利标题: Optical microcantilever, manufacturing method thereof, and optical microcantilever holder
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申请号: US11602373申请日: 2006-11-20
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公开(公告)号: US07240541B2公开(公告)日: 2007-07-10
- 发明人: Takashi Niwa , Kenji Kato , Susumu Ichihara , Norio Chiba , Yasuyuki Mitsuoka , Manabu Oumi , Nobuyuki Kasama
- 申请人: Takashi Niwa , Kenji Kato , Susumu Ichihara , Norio Chiba , Yasuyuki Mitsuoka , Manabu Oumi , Nobuyuki Kasama
- 申请人地址: JP
- 专利权人: Seiko Instruments Inc.
- 当前专利权人: Seiko Instruments Inc.
- 当前专利权人地址: JP
- 代理机构: Adams & Wilks
- 优先权: JP11-72218 19990317; JP2000-40030 20000217
- 主分类号: G01N13/14
- IPC分类号: G01N13/14
摘要:
An optical microcantilever capable of reducing loss when propagating light. An optical microcantilever 10 comprises a support 1, an optical waveguide 2, a light-blocking film 3, a reflecting film 4, a pointed tip 5, a microscopic aperture 6 formed at the end of the tip 5, and a mirror 7 for reflecting propagating light H propagated from a light input/output end 8 of the optical waveguide 2 towards the microscopic aperture 6.
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