Invention Grant
- Patent Title: Low temperature synthesis of semiconductor fibers
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Application No.: US11515051Application Date: 2006-09-01
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Publication No.: US07241432B2Publication Date: 2007-07-10
- Inventor: Shashank Sharma , Mahendra Kumar Sunkara
- Applicant: Shashank Sharma , Mahendra Kumar Sunkara
- Applicant Address: US KY Louisville
- Assignee: University of Louisville
- Current Assignee: University of Louisville
- Current Assignee Address: US KY Louisville
- Agency: Carrithers Law Office PLLC
- Agent David W. Carrithers
- Main IPC: C01B15/14
- IPC: C01B15/14

Abstract:
This invention presents a process to produce bulk quantities of nanowires of a variety of semiconductor materials. Large liquid gallium drops are used as sinks for the gas phase solute, generated in-situ facilitated by microwave plasma. To grow silicon nanowires for example, a silicon substrate covered with gallium droplets is exposed to a microwave plasma containing atomic hydrogen. A range of process parameters such as microwave power, pressure, inlet gas phase composition, were used to synthesize silicon nanowires as small as 4 nm (nanometers) in diameter and several micrometers long. As opposed to the present technology, the instant technique does not require creation of quantum sized liquid metal droplets to synthesize nanowires. In addition, it offers advantages such as lower growth temperature, better control over size and size distribution, better control over the composition and purity of the nanowires.
Public/Granted literature
- US20070003467A1 Low temperature synthesis of semiconductor fibers Public/Granted day:2007-01-04
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