发明授权
US07242065B2 Compact pressure sensor with high corrosion resistance and high accuracy
有权
紧凑型压力传感器,具有高耐腐蚀性和高精度
- 专利标题: Compact pressure sensor with high corrosion resistance and high accuracy
- 专利标题(中): 紧凑型压力传感器,具有高耐腐蚀性和高精度
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申请号: US11081525申请日: 2005-03-17
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公开(公告)号: US07242065B2公开(公告)日: 2007-07-10
- 发明人: Ichiharu Kondo , Hiroaki Tanaka , Inao Toyoda , Makoto Totani
- 申请人: Ichiharu Kondo , Hiroaki Tanaka , Inao Toyoda , Makoto Totani
- 申请人地址: JP Kariya
- 专利权人: DENSO CORPORATION
- 当前专利权人: DENSO CORPORATION
- 当前专利权人地址: JP Kariya
- 代理机构: Posz Law Group, PLC
- 优先权: JP2004-081681 20040319
- 主分类号: H01L29/84
- IPC分类号: H01L29/84 ; G01L9/00
摘要:
A pressure sensor includes a sensor chip and a circuit chip. The sensor chip, which is configured to generate an electrical signal representative of a pressure being sensed, has a surface including a sensing area and a plurality of electrical contact pads disposed on the surface. The circuit chip includes a circuit configured to process the electrical signal and has a surface on which a plurality of electrical contact pads of the circuit chip are disposed. The circuit chip is joined to the sensor chip so that the electrical contact pads of the circuit chip are respectively electrically connected to those of the sensor chip, all the electrical contact pads of the circuit chip and the sensor chip are hermetically sealed and isolated from the fluid, and the surfaces of the circuit chip and the sensor chip face each other with the electrical contact pads of the same interposed therebetween.
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