发明授权
- 专利标题: Inspection apparatus
- 专利标题(中): 检验仪器
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申请号: US11180905申请日: 2005-07-14
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公开(公告)号: US07243033B2公开(公告)日: 2007-07-10
- 发明人: Chie Sato , Yusuke Kishine , Tetsuya Ohtani , Minoru Akutsu , Hiroshi Sugawara , Akira Toyama , Hirotoshi Kodaka , Katsuya Ikezawa , Shinji Kobayashi , Akira Miura
- 申请人: Chie Sato , Yusuke Kishine , Tetsuya Ohtani , Minoru Akutsu , Hiroshi Sugawara , Akira Toyama , Hirotoshi Kodaka , Katsuya Ikezawa , Shinji Kobayashi , Akira Miura
- 申请人地址: JP Tokyo
- 专利权人: Yokogawa Electric Corporation
- 当前专利权人: Yokogawa Electric Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Sughrue Mion, PLLC
- 优先权: JPP.2004-207989 20040715
- 主分类号: G01R13/00
- IPC分类号: G01R13/00
摘要:
An inspection apparatus inspects an inspected object based on a waveform quality of a signal that the inspected object outputs. The inspection apparatus has a power supply section which outputs a control signal that controls an output of the inspected object, a waveform measuring section which measures the signal that the inspected object outputs to generate a waveform image, an analyzing section which derives a value indicating a waveform quality from the waveform image that the waveform measuring section measures, a deciding section which decides whether or not the value derived by the analyzing section satisfies a target value, and an optimizing section which changes a set value of the control signal that the power supply section outputs, based on a decision result of the deciding section.
公开/授权文献
- US20060025708A1 Inspection apparatus 公开/授权日:2006-02-02