发明授权
US07245412B2 On-the-fly laser beam path error correction for specimen target location processing
有权
用于样本目标位置处理的实时激光束路径误差校正
- 专利标题： On-the-fly laser beam path error correction for specimen target location processing
- 专利标题（中）： 用于样本目标位置处理的实时激光束路径误差校正
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申请号： US10985840申请日： 2004-11-09
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公开(公告)号： US07245412B2公开(公告)日： 2007-07-17
- 发明人: Kelly Bruland , Clint Vandergiessen , Keith Grant , Stephen Swaringen
- 申请人： Kelly Bruland , Clint Vandergiessen , Keith Grant , Stephen Swaringen
- 申请人地址： US OR Portland
- 专利权人： Electro Scientific Industries, Inc.
- 当前专利权人： Electro Scientific Industries, Inc.
- 当前专利权人地址： US OR Portland
- 代理机构： Stoel Rives LLP
- 主分类号： G02B26/08
- IPC分类号： G02B26/08 ; B23K26/08
摘要：
A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.