发明授权
US07247968B2 Two-axis micro-actuator with multidimensional actuation with large area stage 失效
双轴微型致动器,具有大面积阶段的多维驱动

Two-axis micro-actuator with multidimensional actuation with large area stage
摘要:
Provided is a two-axis actuator having a large stage area. The two-axis actuator includes a stage moving in two directions and connected to an upper part of an inertial part. The two-axis actuator is configured to maximize a stage area relative to the overall area of the actuator, thereby increasing the data storage capacity of the stage.
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