发明授权
US07247968B2 Two-axis micro-actuator with multidimensional actuation with large area stage
失效
双轴微型致动器,具有大面积阶段的多维驱动
- 专利标题: Two-axis micro-actuator with multidimensional actuation with large area stage
- 专利标题(中): 双轴微型致动器,具有大面积阶段的多维驱动
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申请号: US10922861申请日: 2004-08-23
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公开(公告)号: US07247968B2公开(公告)日: 2007-07-24
- 发明人: Kyoung-lock Baeck , Jong-up Jun , Ju-hwan Jung , Seung-bum Hong
- 申请人: Kyoung-lock Baeck , Jong-up Jun , Ju-hwan Jung , Seung-bum Hong
- 申请人地址: KR Gyeonggi-do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Gyeonggi-do
- 代理机构: Sughrue Mion, PLLC
- 优先权: KR10-2003-0058286 20030822
- 主分类号: H02K1/00
- IPC分类号: H02K1/00
摘要:
Provided is a two-axis actuator having a large stage area. The two-axis actuator includes a stage moving in two directions and connected to an upper part of an inertial part. The two-axis actuator is configured to maximize a stage area relative to the overall area of the actuator, thereby increasing the data storage capacity of the stage.
公开/授权文献
- US20050040730A1 Two-axis actuator with large area stage 公开/授权日:2005-02-24
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