发明授权
- 专利标题： Lithographic apparatus and patterning device transport
- 专利标题（中）： 平版印刷设备和图案形成装置运输
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申请号： US10874690申请日： 2004-06-24
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公开(公告)号： US07248340B2公开(公告)日： 2007-07-24
- 发明人: Erik Leonardus Ham , Robert Gabriël Maria Lansbergen , Ellart Alexander Meijer , Hendricus Johannes Maria Meijer , Hans Meiling , Bastiaan Matthias Mertens , Johannes Hubertus Josephina Moors , Gert-Jan Heerens
- 申请人： Erik Leonardus Ham , Robert Gabriël Maria Lansbergen , Ellart Alexander Meijer , Hendricus Johannes Maria Meijer , Hans Meiling , Bastiaan Matthias Mertens , Johannes Hubertus Josephina Moors , Gert-Jan Heerens
- 申请人地址： NL Veldhoven
- 专利权人： ASML Netherlands B.V.
- 当前专利权人： ASML Netherlands B.V.
- 当前专利权人地址： NL Veldhoven
- 代理机构： Pillsbury Winthrop Shaw Pittman LLP
- 主分类号： G03B27/42
- IPC分类号： G03B27/42 ; G03B27/62
摘要：
A transport box for transporting a lithographic patterning device and a lithographic apparatus adapted to cooperate with the transport box are presented. The transport box is provided with a container part having an inner space with a storing position for storing the patterning device and an opening for the transfer of the patterning device. The box also includes a closure part for closing the opening, and a channel system for evacuating and/or feeding gasses from/to the inner space the box.
公开/授权文献
- US20050286041A1 Lithographic apparatus and patterning device transport 公开/授权日：2005-12-29
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